Metal Sheet Resistance Measurement

Kla technologies include both contact and non contact methods.

Metal sheet resistance measurement.

However it actually represents the resistance between opposite sides of a square of a material rather than bulk resistance. Simultaneous measurement of anisotropy optical transmission. Examples of these processes are. Film thickness measurement and monitoring.

Detection of deposition inhomogeneities. To calculate ohms cm using a four point probe one needs to know the thickness of the wafer if it is a homogeneous wafer or the thickness of the top layer that s being measured to be able to. Measure the length of the sheet using a tape measure. Sheet resistance often called sheet resistivity is a measure of resistance of thin films that are nominally uniform in thickness.

Sheet resistance measurement unit even though the correct physical unit of sheet resistance or sheet resistivity is ohm the unit most commonly used is ohm sq the sheet resistance is specified in ohm sq or ops in order to achieve a differentiation for the specific resistance which is indicated in ohm. By measuring of resistance between metal pads for a set of different gaps the following figure can be obtained. Non contact sheet resistance measurement. To calculate the resistance of an object such as copper sheet you will need a knowledge of its resistivity which is another name for its fundamental electrical properties and its shape or geometry.

The utility of sheet resistance as opposed to resistance or resistivi. The term ohms per square is used when measuring sheet resistance i e the resistance value of a thin layer of a semi conductive material. It is commonly used to characterize materials made by semiconductor doping metal deposition resistive paste printing and glass coating. Resistance rdut is then calculated and displayed using the known current and measured voltage rdut vmeas isour.

The sheet resistance is expressed with the units ω sq or ohms per square to differentiate it from bulk resistance. When di 0 the intercept of the line at y axis is 2r0. Inline monitoring ex vacuo and in vacuo. The units of this equation resolve to ohms ω.

Imaging of conductivity related characteristics. Filmetrics sheet resistance measurement tools marry the technology developed and perfected by kla for over 30 years with the bench top instrument technology developed over the last 20 years by the filmetrics team. Metal layers al mo au etc. Doped semiconductor regions and the resistors that are screen printed onto the substrates of thick film hybrid microcircuits.

Sheet resistance rs is commonly defined as the resistivity ρ of a material divided by its thickness t.